SEMprober

SEMprober refers to a class of integrated instrumentation that combines a scanning electron microscope (SEM) with nanoscale probing capabilities to perform in situ measurements on micro- and nano-scale features. The goal is to correlate high-resolution imaging with electrical, mechanical, or thermal testing at precise locations.

A typical SEMprober system includes a SEM column with standard imaging detectors (such as secondary electrons and backscattered electrons) and a dedicated probe stage. The probing assembly uses micro- or nano-manipulators and conductive probes, often controlled by piezoelectric actuators, to position contacts with sub-micron or nanometer precision. Many configurations provide electrical measurement hardware, such as source meters, current/voltage amplifiers, and lock-in amplifiers, sometimes integrated with Kelvin or four-point probe capabilities to extract contact resistance and material properties.

Operation generally begins with SEM imaging to locate the feature of interest. The probe tips are then aligned to contact pads or nanoscale features, and measurements are performed while the sample remains in vacuum. Measurements can include current–voltage (I–V) curves, resistance mapping, leakage, breakdown testing, and, in some systems, in situ electrical or thermal stimulation. The imaging data can be correlated with the measurement results to understand failure mechanisms, material behavior, or device performance at the nanoscale.

Applications span semiconductor device analysis, failure analysis, characterization of thin films and 2D materials, MEMS, and advanced packaging. Advantages include precise localization and combined morphological and electrical data; limitations involve potential sample damage from probing, beam-induced effects, and the need for conductive or specially prepared samples.