MEMSIntegration
MEMSIntegration is the field focused on embedding microelectromechanical systems with electronics and other components to create compact, functional systems. It covers both monolithic approaches, where MEMS and circuitry are fabricated on a single substrate, and heterogeneous approaches, where MEMS devices are integrated with separate electronics or subsystems through bonding, interconnects, or packaging techniques.
Integration methods span several strategies. Monolithic MEMS–CMOS integration enables tight coupling and reduced parasitics but requires
Packaging and reliability are central to MEMSIntegration. MEMS devices often require hermetic or vacuum sealing, wafer-level
Applications span inertial sensors (accelerometers and gyroscopes), pressure sensors, RF MEMS switches and resonators, optical MEMS