Nanomachining

Nanomachining describes techniques that produce or modify features on the nanometer scale by removing or rearranging material. It sits at the interface of nanofabrication and precision machining and complements lithography and etching. Methods are often divided into mechanical nanomachining, which uses a physical tool to abrade or cut the surface, and non-mechanical approaches that alter material properties with nanoscale energy delivery.

Mechanical nanomachining commonly employs scanning probe instruments, such as atomic force microscopes, where a sharp tip scratches, indents, or wears away material to form patterns. Focused ion beam milling and nanoscale lithography with electron or ion beams can also sculpt features with nanometer precision. In some cases, ultra-precision turning or diamond machining is used to pre-shape materials before finer nanomachining.

Materials include silicon, metals, and polymers. Feature sizes typically span about 1 to 100 nanometers, though some techniques reach a few nanometers. Throughput is low and accuracy depends on tool condition, vibration control, and surface preparation. Metrology relies on high-resolution microscopy and surface profilometry to verify dimensions and roughness.

Applications range from prototyping nanoscale devices and optical surfaces to textured interfaces for tribology, microelectromechanical systems, and nanofluidics. Nanomachining also supports fundamental research into nanoscale phenomena by providing controlled, well-defined features for experiments.

Limitations include slow speeds, high cost, and sensitivity to environmental factors and tool wear. Artifacts such as subsurface damage or surface reconstruction can occur. Ongoing work aims to improve repeatability, integration with other nanofabrication methods, and in situ metrology.