MEMSTypen

MEMSTypen refers to the typologies of MEMS, or microelectromechanical systems, which are devices that combine mechanical elements, sensors, actuators, and electronics on a common microfabricated substrate, typically silicon. MEMS typologies are categorized by function and operating principle, and they cover a broad range of sensing, actuation, and signal processing tasks.

Sensor MEMS include inertial sensors such as accelerometers and gyroscopes, pressure and tactile sensors, chemical and gas sensors, and microphones. Actuator MEMS provide motion or force using mechanisms based on electrostatic, magnetic, piezoelectric, or thermal effects. These actuators enable micro-switching, microvalves, or tiny movement of microstructures in compact packages.

Optical MEMS use micro-mirrors, microshutters, or diffractive elements to control light for imaging, projection, or optical switching. RF MEMS comprises switches, tunable capacitors, resonators, and other components that improve radio-frequency front ends and enable reconfigurable communication systems. Microfluidic and bioMEMS integrate fluid channels and biological interfaces for lab-on-a-chip devices, drug delivery, or diagnostic tools.

Fabrication and integration ideas include silicon-based micromachining techniques such as bulk micromachining and surface micromachining, as well as processes like LIGA. CMOS-MEMS integration combines sensing or actuation with on-die signal processing. Packaging and interconnects, including wafer-level packaging, remain important for reliability and performance.

Applications span consumer electronics, automotive systems, medical devices, and industrial automation. Typical examples include smartphone accelerometers, airbag sensors, MEMS microphones, optical scanning mirrors, and microfluidic biosensors. Ongoing challenges involve reliability, protective packaging, cost reduction, and power efficiency, alongside advances in materials and multi-physics design.