processgaser
Processgaser is a term used in industrial engineering to describe a device or integrated system that generates, conditions, and delivers process gases necessary for chemical and manufacturing processes. The concept covers on-site generation of gases such as nitrogen, hydrogen, argon, ammonia, and specialty mixtures used in processing, purification, and surface treatment.
Operation is based on producing gas from feedstocks or separating components from mixtures, then purifying and
Typical components include a generation chamber or reactor, feedstock storage, a purification train (adsorbers, filters, or
Applications span semiconductor fabrication (inert and reactive gas atmospheres for etching and deposition), metal finishing and
Advantages of processgaser systems include improved gas purity, reduced logistics costs, and increased responsiveness to demand.