electronbeamassisted
Electron beam assisted processes are material processing or fabrication methods in which a focused electron beam interacts with a substrate in the presence of a gas or under specific environmental conditions to drive or enhance chemical or physical transformations. These processes are widely used in nanofabrication, surface modification, and additive manufacturing at the micro to nano scale.
Key mechanisms include localized heating from energy deposition, generation of secondary electrons that initiate reactions, and
Common techniques include electron beam induced deposition (EBID), where a focused beam locally decomposes a precursor
Advantages include high spatial resolution and direct-write capability without masks, while challenges include contamination from residual