SEMbased

SEMbased refers to techniques and analyses that rely on scanning electron microscopy (SEM) as the primary tool for data acquisition and interpretation. SEMbased methods enable high-resolution imaging of surface morphology, texture, and microstructure, and can be combined with additional detectors and modalities to obtain compositional, crystallographic, and functional information. They are widely used in materials science, metallurgy, geology, electronics, and biology for characterization at micro- to nano-scale dimensions.

Common SEMbased techniques include standard SEM imaging with secondary and backscattered electrons to reveal topography and composition contrast, as well as energy-dispersive X-ray spectroscopy (EDS) for qualitative and quantitative elemental analysis. Electron backscatter diffraction (EBSD) provides crystallographic orientation data, while cathodoluminescence (CL) offers optical information from specific materials. Focused ion beam (FIB) coupling allows SEMbased tomography and precise cross-sectioning for 3D reconstruction, expanding the capabilities of surface-focused analysis.

Workflow considerations for SEMbased work involve appropriate sample preparation, such as achieving electrical conductivity and vacuum compatibility, and selecting imaging parameters like accelerating voltage, working distance, and detector settings. Charging, beam damage, and specimen geometry can influence data quality, so calibration and controlled data acquisition are essential. Data interpretation often requires specialized software for image analysis, spectral mapping, and phase identification.

Applications of SEMbased methods span failure analysis, microstructural characterization, mineralogy, and nanofabrication studies. While SEMbased approaches offer high resolution and rich datasets, they typically require conductive specimens, careful sample preparation, and access to compatible instrumentation.