NanoElectromechanical

Nanoelectromechanical systems, or NEMS, are devices that integrate electrical and mechanical functionality on nanoscale structures. They extend the concepts of MEMS into the nanometer range, using components such as cantilevers, beams, membranes, and resonators with dimensions from tens to hundreds of nanometers. NEMS devices exploit electromechanical coupling to sense or actuate motion, with readout typically achieved through electrostatic, piezoelectric, magnetic, or optical methods. They can operate as high-frequency resonators with low mass and high sensitivity to external forces or masses.

NEMS developed from MEMS research, with early demonstrations in the 2000s using carbon nanotubes and silicon nanowires. Platforms include carbon nanotube resonators, graphene membranes, silicon nanobeams, and other low-dimensional materials. Fabrication combines top-down lithography and etching with release processes to create suspended nanoscale structures, while bottom-up synthesis is also used for certain materials. Readout schemes often integrate transistors or rely on external transducers.

Applications of NEMS include ultrasensitive mass, force, and chemical or biological sensing, as well as RF switches and filters, timing references, and nanoactuators. In fundamental research, NEMS enable experiments at the intersection of classical and quantum mechanics, particularly when cooled to low temperatures. Challenges remain in achieving high mechanical quality factors, reducing dissipation, integrating with electronics, packaging, and scalable manufacturing.

Overall, NEMS hold potential for compact, high-performance sensing and signal processing, with ongoing work aimed at improving reliability and CMOS compatibility.