MEMSCMOSintegraatiot
MEMSCMOSintegraatiot refers to the integration of Micro-Electro-Mechanical Systems (MEMS) with Complementary Metal-Oxide-Semiconductor (CMOS) integrated circuits on a single chip. This integration allows for the creation of highly sophisticated devices that combine the sensing or actuating capabilities of MEMS with the signal processing and control functions of CMOS.
The core concept behind MEMSCMOSintegraatiot is to fabricate both the mechanical structures of MEMS and the
Various integration techniques exist, such as monolithic integration, where MEMS and CMOS are fabricated layer by
MEMSCMOSintegraatiot are crucial for a wide range of applications. They are found in inertial sensors like