Taktilprofilometrie

Taktilprofilometrie, also known as tactile profilometry, is a non-contact or contact-based measurement technique used to determine the surface topography of a material. It utilizes a tactile probe or stylus that scans across the surface, recording its vertical deviations. The data collected by the probe is then processed to generate a three-dimensional representation of the surface, often referred to as a surface profile or map. This technique is particularly useful for measuring relatively smooth surfaces where optical methods might struggle with reflectivity or transparency.

The principle behind tactile profilometry involves a highly sensitive stylus tip that traces the contours of the surface. As the stylus moves, its vertical displacement is converted into an electrical signal, which is then digitized and stored. The lateral movement is typically controlled by a precision stage. The resolution of tactile profilometry depends on the size of the stylus tip and the accuracy of the positioning system. While it can achieve high vertical resolution, the lateral resolution is generally limited by the stylus diameter.

Applications of tactile profilometry span various industries. It is widely employed in manufacturing for quality control of machined parts, ensuring that surfaces meet specified tolerances. In the semiconductor industry, it's used to measure the flatness and roughness of wafers. Research and development also benefit from this technique for characterizing novel materials and understanding surface interactions. Despite the advent of optical methods, tactile profilometry remains a valuable and often preferred method for its robustness and ability to measure a wide range of materials, including opaque and transparent ones, under various environmental conditions.