SECSGEM

SECSGEM is a family of SEMI standards that define how semiconductor manufacturing equipment communicates with host computer systems. SECS provides the communication framework, while GEM (Generic Equipment Model) specifies a standard equipment interface that enables hosts to monitor, control, and collect data from production equipment. The SECSGEM model supports automated, vendor-neutral integration of equipment into factory IT systems and manufacturing execution systems (MES).

SECS comprises SECS-I for the transport layer and SECS-II for the content of messages. In networked environments, HSMS (Host Subsystem Management) is commonly used to carry SECS-II messages over TCP/IP. GEM adds a defined set of capabilities that equipment should provide, including equipment status and control; alarm and event reporting; process data reporting; job management and control; recipe download and management; data and wafer/lot traceability; equipment constants; and basic security or access controls.

Adoption and use: SECS/GEM is widely used in semiconductor fabs to enable cross-vendor interoperability and to support real-time monitoring, remote operation, and data-driven yield optimization. Implementations vary in scope; some equipment provides full GEM functionality, while others offer a subset tailored to essential telemetry and control. Integration often requires mapping SECS/GEM data to host data models and existing manufacturing IT systems.

Overall, SECS/GEM remains a foundational interface standard in many fabs, providing a common, extensible framework for equipment-host communication, data exchange, and automated control across diverse equipment vendors.