NonMEMS

NonMEMS refers to devices, systems, or components that are not manufactured using microelectromechanical systems (MEMS) processes. They typically operate at macro-scale, rely on conventional bulk fabrication or discrete components, and are not integrated with silicon-based microfabrication.

The term is used in technical literature to differentiate devices fabricated with bulk or traditional manufacturing methods from MEMS devices, which combine micro-scale mechanical elements with electronics on a single silicon substrate. NonMEMS encompasses macro-scale sensors and actuators, bulk-etched fluidic channels, optical components assembled rather than microfabricated, and many legacy technologies that predate MEMS.

Applications commonly described as nonMEMS include traditional accelerometers or pressure sensors built from bulk or discrete components, large-scale optical sensors, mechanical housings, and macro actuators used in vehicles or industrial machinery, as well as certain micro-scale devices that do not use MEMS processes. In research, nonMEMS is used to compare performance, cost, and integration challenges against MEMS-based approaches.

Advantages of nonMEMS can include simpler manufacturing for low-volume production, higher absolute force or power handling, robustness to harsh environments, and easier repairability. Limitations include larger size, higher unit cost at high volumes, slower form factors, and lack of easy integration with on-chip electronics.

See also: MEMS, microfabrication, bulk micromachining, macro-scale sensors.