EBSDAnalysen

EBSDAnalysen refers to analyses performed with electron backscatter diffraction (EBSD), a scanning electron microscope (SEM)–based technique for measuring crystallographic orientation and microstructure at small length scales. The method records Kikuchi diffraction patterns generated when an electron beam interacts with a tilted, polished crystalline sample surface; pattern indexing yields orientation, phase and texture information for mapped areas.

Typical outputs of EBSDAnalysen include orientation maps, inverse pole figures, pole figures, misorientation distributions and grain boundary characterization. These data support quantitative studies of grain size and shape, texture evolution, strain localization, phase distribution and recrystallization, and are widely used in metallurgy, ceramics, geology, thin films and failure analysis.

Successful EBSDAnalysen requires careful sample preparation to produce a clean, deformation-free surface, often including mechanical polishing, ion milling or focused ion beam thinning. Measurements are performed in an SEM with a phosphor screen and camera; modern systems use automated indexing software to process large maps. Spatial resolution ranges from sub-micrometer to tens of nanometers depending on beam conditions and material.

Limitations include sensitivity to surface quality and crystallinity, reduced performance on amorphous or highly strained regions, and potential difficulty distinguishing similar phases. EBSD is often combined with complementary techniques such as energy-dispersive X-ray spectroscopy (EDS), transmission electron microscopy (TEM) or orientation imaging microscopy to provide comprehensive microstructural characterization.