vakuumtechnische

Vakuumtechnik, or vacuum technology, is the engineering discipline that deals with creating, maintaining, and using vacuum conditions in equipment and processes. The term vakuumtechnische is used in German-language contexts to describe devices, systems, and methods related to vacuum technology.

Key concepts include vacuum levels, such as rough, high, and ultra-high vacuum, and the management of residual gases. A vacuum system typically consists of a chamber, one or more vacuum pumps, seals, valves, and measurement instruments. Pumps range from oil-sealed rotary pumps and dry scroll pumps for rough vacuum to turbomolecular and ion pumps for high and ultra-high vacuum. Gauges (Pirani, thermocouple, capacitance diaphragm, and ionization gauges) monitor pressure, while seals and flanges (eg, O-rings and knife-edges) maintain the chamber integrity.

Processes used in vacuum technology include pump-down, bake-out to remove adsorbed gases, degassing of materials, leak testing, and in-situ gas analysis. Material selection and surface preparation are important to minimize outgassing and contamination.

Applications span semiconductor fabrication and thin-film coating, vacuum distillation and drying, metallurgy, scientific research in physics and chemistry, freeze-drying, and vacuum packaging. The field also supports medical devices and analytical instrumentation that require controlled atmospheres.

Historically, vacuum technology emerged from 17th-century experiments and advanced through the 20th century with improved pumping and measurement techniques. Modern practice relies on standards and best practices from ISO and other international organizations, as well as professional communities such as the European Vacuum Society.