substratefacing
Substratefacing refers to the surface or orientation of a functional layer or device that is in direct contact with an underlying substrate in a composite structure. In semiconductor manufacturing, substratefacing is critical for effective electrical performance, heat dissipation and mechanical stability. The term commonly applies to field‑effect transistors (FETs), thin‑film transistors, sensors, and various microdevices where a conductive or active layer is deposited, patterned, or grown onto a base substrate such as silicon, glass, polymer, or ceramic.
The main goal of substratefacing is to minimize interfacial defects and to control adhesion, lattice mismatch,
In microelectromechanical systems (MEMS), substratefacing determines the mechanical coupling between moving structures and the fixed substrate,
The quality of substratefacing is typically evaluated through surface characterization methods including atomic force microscopy, X‑ray