Turbomolekyylipumppu

Turbomolekyylipumppu, often referred to as a turbopump, is a type of high-vacuum pump. It operates by using rapidly rotating blades to impart momentum to gas molecules, pushing them from the inlet to the outlet. The design is analogous to a jet engine or a steam turbine, with multiple stages of rotating and stationary blades.

The rotor spins at extremely high speeds, typically tens of thousands of revolutions per minute. As gas molecules enter the pump, they strike the moving blades and are accelerated in the direction of the pump's outlet. The stationary blades then redirect the gas flow to the next set of rotating blades, further increasing the momentum transfer and pressure reduction.

Turbomolecular pumps are effective at achieving very low pressures, making them suitable for applications requiring ultra-high vacuum conditions. They are commonly used in scientific research, semiconductor manufacturing, space simulation chambers, and particle accelerators.

A key characteristic of turbomolecular pumps is their need for a backing pump. Because they cannot expel gas directly to atmospheric pressure, a lower-vacuum pump, such as a rotary vane pump or a diaphragm pump, is required to exhaust the gas from the turbopump's outlet. This backing pump handles the rough vacuum and allows the turbopump to reach its ultimate low pressure.

Turbomolecular pumps are generally clean pumps, meaning they do not introduce contaminants into the vacuum system, which is crucial for sensitive processes. They are also relatively quiet and vibration-free compared to some other vacuum pump technologies. However, they are sensitive to particulates and can be damaged by solid objects entering the pump.