RFprober

RFprober refers to a class of high-frequency probing equipment used to access RF signals on semiconductor devices, boards, or packages. It pairs microfabricated RF probes with a precision probe station and signal-conditioning electronics to permit direct measurement of RF performance at the device under test. RFprober systems are common in laboratories and manufacturing lines for characterizing RFICs, power amplifiers, mixers, antennas, and high-frequency interconnects.

Construction and operation: A typical RFprober includes a motorized XY stage, RF probes with ground-signal-ground configuration, high-frequency coaxial cables, and a calibration substrate. Probes are designed to maintain 50-ohm impedance and minimize parasitics at target frequencies. The measurement chain often connects to a vector network analyzer, spectrum analyzer, or fast oscilloscope, sometimes via a custom probe head or interposer. Calibration uses standards (open, short, load) and software to de-embed probe effects and extract device parameters.

Capabilities: RFprober supports S-parameter measurements, time-domain measurements, and sometimes on-wafer or in-package testing. Frequency ranges typically span from several megahertz up to tens of gigahertz, depending on the probe design. Some systems offer automated tip setting, thermal stabilization, and environmental control.

Applications: Used in RFIC development, mobile and wireless device testing, antenna characterization, and quality assurance for RF interconnects. It helps engineers verify impedance, gain, noise figure, return loss, and linearity at the device level.

History and developments: The concept emerged with the rise of RF integrated circuits and microwave engineering, evolving through precision probe technology and wafer-probing methods.