Probelithografi

Probelithografi is a method used in semiconductor manufacturing and nanotechnology for creating patterns on a substrate. Unlike optical lithography, which uses light to transfer a pattern from a mask to a photosensitive material, probelithography employs a physical probe to directly draw or deposit material onto the substrate. This technique is often implemented using scanning probe microscopes (SPMs), such as atomic force microscopes (AFMs) or scanning tunneling microscopes (STMs).

The process typically involves a sharp tip, the probe, that interacts with the surface. This interaction can be used in various ways. For instance, the probe can scratch or etch the surface in a controlled manner, effectively removing material to create a pattern. Alternatively, the probe can be used to deposit material, either by picking up and delivering nanoparticles or by facilitating local chemical reactions. Another approach involves using the probe to induce or modify electrical or chemical properties of the substrate at a nanoscale.

The key advantage of probelithography lies in its ability to achieve extremely high resolution, often down to the nanometer scale or even below, which is difficult to attain with conventional optical lithography due to the diffraction limit of light. This makes it suitable for fabricating nanoscale devices, studying material properties at the atomic level, and creating complex three-dimensional structures. However, probelithography is generally a serial process, meaning it writes patterns point-by-point, which can lead to slower writing speeds compared to parallel techniques like mask-based lithography, making it more suitable for research, prototyping, or the fabrication of small-area, high-density structures.