probelithography

Probelithography is a nanolithography technique that uses a sharpened tip, often a scanning probe microscope (SPM) tip, to directly pattern a surface. Unlike photolithography, which relies on light to transfer a pattern, probelithography uses physical contact or near-field interactions to deposit or remove material. This direct writing approach allows for high resolution, often down to a few nanometers, without the need for masks.

There are several variations of probelithography. One common method involves using a heated tip to locally modify a resist layer, similar to thermal scanning probe lithography. Another approach uses a tip coated with an ink or a reactive chemical, which is then deposited onto the substrate in a controlled manner. Electrically biased tips can also be used to induce local chemical reactions or material transport.

The primary advantage of probelithography is its maskless nature, which simplifies the fabrication process and reduces costs for prototyping or low-volume production. It offers flexibility in pattern generation and the ability to create arbitrary designs. However, the writing speed can be significantly slower compared to parallel lithography techniques like photolithography, making it less suitable for mass manufacturing. Probelithography finds applications in areas such as creating nanoscale devices, fabricating custom masks, and modifying surfaces for scientific research.