PVDFlakken
PVDFlakken is a term used in the field of thin-film deposition to describe a pulsed-velocity controlled variant of physical vapor deposition (PVD). It is characterized by synchronized pulsing of the deposition energy with a moving substrate or shuttling of the substrate and/or target to modulate the arrival flux and impingement angle of adatoms. The approach aims to tailor microstructure and stress in coatings by combining pulsed deposition with controlled translation of the substrate.
Process and equipment: A typical PVDFlakken setup operates under high vacuum, with a deposition source such
Materials and structures: The technique has been reported for a range of materials including nitrides (TiN,
Applications and status: Potential applications include wear-resistant coatings for cutting tools, protective optical coatings, and electronic