Mikrofabrikointia

Mikrofabrikointia refers to the processes used to create extremely small structures and devices, often on the microscale (ranging from micrometers to millimeters) or even nanoscale (less than 100 nanometers). These techniques are fundamental to the manufacturing of microelectronics, such as integrated circuits (computer chips), as well as microelectromechanical systems (MEMS), which integrate mechanical and electrical components.

The core of microfabrication involves precisely controlling the deposition, patterning, and etching of various materials on a substrate, typically a silicon wafer. Common processes include photolithography, where light is used to transfer a pattern onto a light-sensitive material (photoresist). This patterned photoresist then acts as a mask for subsequent etching or deposition steps. Deposition techniques like chemical vapor deposition (CVD) and physical vapor deposition (PVD) are used to add thin layers of materials. Etching processes, both wet chemical etching and dry plasma etching, are employed to remove unwanted material according to the designed pattern.

Beyond these foundational techniques, microfabrication also encompasses other methods such as electron beam lithography for even finer resolution, inkjet printing for additive manufacturing of microstructures, and various micro-molding and micro-machining approaches. The development and refinement of microfabrication technologies have been crucial drivers of technological advancement, enabling smaller, faster, and more powerful electronic devices and innovative micro-scale sensors and actuators.