Mikrobearbeitungen

Mikrobearbeitungen, also known as microfabrication or micro-machining, refers to a set of processes used to create miniature structures or devices with dimensions typically in the micrometer range. These techniques are fundamental to the development of microelectromechanical systems (MEMS), sensors, actuators, and integrated circuits.

The fabrication of micro-scale components often involves subtractive or additive manufacturing methods adapted for high precision. Subtractive techniques remove material from a substrate, such as photolithography followed by etching, where a mask defines the pattern to be removed. Plasma etching and wet chemical etching are common methods. Additive processes build up material layer by layer. Examples include 3D printing at the micro-scale, also known as micro-3D printing, and deposition techniques like chemical vapor deposition (CVD) or physical vapor deposition (PVD).

Key processes in mikrobearbeitungen include lithography, which uses light to transfer a pattern onto a light-sensitive material, and etching, which selectively removes material. Another important technique is micro-molding, where a mold is used to shape materials. More advanced methods like focused ion beam (FIB) milling allow for direct writing and modification of structures at very high resolution.

The applications of mikrobearbeitungen are widespread, impacting fields such as electronics, medicine, and automotive industries. They enable the miniaturization of devices, leading to increased functionality, reduced power consumption, and lower costs. The continuous advancement in mikrobearbeitungen drives innovation in countless technological areas.