Microprecision
Microprecision refers to the level of precision and accuracy that can be achieved in the design, manufacture, and measurement of components with dimensions on the micrometer scale or smaller. In practice, microprecision encompasses tolerances from a few micrometers down to the sub-micron or nanometer regime, depending on the application and the available technology. The term is used across fields such as semiconductor fabrication, microelectromechanical systems (MEMS), optics, precision engineering, and biomedical devices, where features and alignments must be controlled at very small scales.
Realization of microprecision relies on advanced metrology and process control. Tools include coordinate measuring machines, optical
Environmental control is critical, as thermal drift, vibration, and humidity can degrade micro-scale tolerances. Material behavior
Applications span MEMS devices, high-precision optics and instrumentation, microfluidic systems, and semiconductor processing. As demands for