MEMSteknologiaan
MEMSteknologiaan, often called MEMS technology, is a branch of engineering that deals with micro-electro-mechanical systems. It covers devices that combine tiny mechanical elements, sensors, actuators, and electronics on a common substrate, typically silicon, using microfabrication techniques developed for semiconductor manufacturing. MEMS devices include accelerometers, gyroscopes, pressure sensors, microphones, and microfluidic components, as well as miniature optical and RF elements.
Fabrication relies on microfabrication processes such as lithography, etching, deposition, and bonding. Methods include surface micromachining,
Applications span consumer electronics, automotive systems, industrial monitoring, healthcare, and telecommunications. MEMS sensors are common in
Challenges include reliability and packaging, such as stiction, wear, thermal drift, and environmental protection, while allowing