MEMSgyroskoope
MEMS gyroscopes, or Micro-Electro-Mechanical Systems gyroscopes, are a type of gyroscope that utilizes micro-machined components to detect and measure angular velocity. Unlike traditional mechanical gyroscopes that rely on the inertia of a spinning rotor, MEMS gyroscopes employ the Coriolis effect acting on vibrating elements. These elements are typically tiny beams or masses fabricated on a silicon substrate using microfabrication techniques. When the device is subjected to rotation, the vibrating elements experience a force perpendicular to both their motion and the axis of rotation, according to the Coriolis principle. This resulting displacement or stress is then converted into an electrical signal, which is proportional to the angular velocity.
The primary advantage of MEMS gyroscopes lies in their small size, low cost, and low power consumption,