micromachined

Micromachined refers to components or devices produced by micromachining, a collection of manufacturing processes that create structures with micrometer-scale features. Often associated with microelectromechanical systems (MEMS), micromachining combines semiconductor fabrication techniques with mechanical structuring to integrate sensors, actuators, and microfluidics on a single substrate. The term is sometimes used to describe devices that have been produced using bulk or surface micromachining methods.

Micromachining employs lithography, thin-film deposition, etching, and bonding. Bulk micromachining removes material from a substrate to form cavities, channels, or membranes, while surface micromachining builds devices from thin films that are released later. Common etching methods include wet chemical etching and dry etching such as reactive ion etching (RIE) and deep reactive ion etching (DRIE).

Materials frequently used include silicon, silicon-on-insulator, quartz, and polymers, with compatibility across metals and ceramics for packaging. Process steps may also involve oxidation, doping, chemical mechanical polishing, and wafer bonding to create complex three-dimensional structures.

Applications span sensors (accelerometers, pressure sensors, gyroscopes), actuators (micromirrors, microvalves), microfluidic devices, optical components, and medical devices. Micromachined structures are also employed in RF MEMS switches, resonators, and microfabricated inkjet or printing heads.

Advantages of micromachining include batch fabrication, small size, low power consumption, and integration with electronics. Challenges include high capital costs for cleanroom facilities, packaging and reliability, surface roughness, stiction, and achieving high yield in complex devices.