Dünnfilmbasiste
Dünnfilmbasiste refers to the substrate material upon which a thin film is deposited. The choice of substrate is critical in determining the properties and applications of the resulting thin film. Common thin film substrates include glass, silicon, polymers, and ceramics. The substrate must be compatible with the deposition process and the intended use of the thin film. For instance, in optical applications, substrates like fused silica or specialized optical glasses are used for their transparency and low refractive index. In microelectronics, highly pure and flat silicon wafers are standard substrates for fabricating integrated circuits.
The substrate influences several key aspects of thin film technology. Its thermal expansion coefficient must often