physicalvapor
Physicalvapor is a term occasionally used in materials science to denote the gaseous phase of a material that is generated by physical, rather than chemical, means. Vapors produced by physical processes such as evaporation, sputtering, or laser ablation may be described as physicalvapor. The term is not widely standardized and is often used informally to refer to the vapor phase in physical vapor deposition contexts.
In practice, physicalvapor is produced under vacuum or low-pressure conditions to minimize gas-phase reactions. The vapor's
Physicalvapor plays a central role in physical vapor deposition techniques such as evaporation, sputtering, and pulsed
Compared with chemical vapor deposition, which relies on gas-phase chemical reactions to form the film, physical