phosphosilicate

Phosphosilicate refers to compounds and materials in which phosphorus is integrated into a silicate (Si–O–Si) network. The most common form is phosphosilicate glass (PSG), a phosphorus-doped silicon dioxide used in various technological applications. PSG is produced by introducing phosphorus sources, such as phosphorus pentoxide or phosphoric acid, into a silica-based glass, creating a mixed oxide network containing Si–O–P linkages.

Structure and chemistry information about phosphosilicate indicates that phosphorus modifies the silicate network. Depending on composition, PSG can behave as a network former or modifier, influencing properties such as viscosity, network connectivity, and diffusion behavior. The presence of phosphorus often enhances reactivity and diffusivity during heat treatment, which is relevant when PSG is used as a dopant source in silicon processing.

Production and processing of PSG films commonly involve deposition techniques such as chemical vapor deposition or spin coating of phosphorus-containing silicate glasses, followed by heat treatment. In semiconductor manufacturing, PSG is frequently annealed to drive phosphorus into silicon substrates, creating doped regions that modify electrical properties or to adjust oxide thickness.

Properties and applications of phosphosilicate materials vary with composition. PSG generally has a higher refractive index than pure silicon dioxide and can exhibit different thermal and chemical stabilities compared with undoped silica. The primary application of PSG is as a phosphorus dopant source for silicon diffusion in microelectronics. More broadly, phosphosilicate materials occur in glasses and ceramics where phosphorus alters network structure and properties, enabling uses in optics, catalysts, or waste immobilization.

See also: phosphates, silicates, phosphosilicate glass, phosphate glass.