microcapacitors
Microcapacitors are miniature capacitors designed for integration into microelectronic systems. They provide local energy storage and fast charge-discharge cycles, serving decoupling, buffering, and signal integrity roles in integrated circuits and MEMS.
Most microcapacitors use interdigital electrode geometries on a chip or vertical architectures embedded in silicon. Common
Materials considerations affect performance; high dielectric constant dielectrics maximize capacitance per area, while porous carbon, graphene,
Applications include decoupling and energy buffering in integrated circuits, RF front-ends, micro-sensors, and micro-energy storage for
Challenges include balancing miniaturization with energy density, reducing leakage and variability, and maintaining performance under temperature