microXray

microXray refers to a class of X-ray imaging systems engineered to visualize micro-scale structures using finely focused X-ray beams. The technology typically combines a microfocus X-ray source or a compact synchrotron beamline, high-numerical-aperture X-ray optics such as polycapillary lenses or Fresnel zone plates, and sensitive detectors like cooled CCDs or CMOS sensors. Imaging modalities include micro radiography, micro tomography, and phase-contrast or speckle-based imaging to enhance contrast in weakly absorbing materials. Both scanning and full-field approaches are employed, enabling different trade-offs between speed, resolution, and field of view.

Key capabilities include high spatial resolution, with typical laboratory implementations achieving micrometer-scale detail and, in some advanced setups, sub-micrometer resolution through specialized optics and configurations. MicroXray systems can operate in various modes, such as transmission tomography for three-dimensional reconstructions or high-contrast radiography for surface and internal features.

Applications span materials science, semiconductor inspection, and the study of polymers and composites. They are also used in paleontology and biology for examining small fossil and tissue microstructures, as well as in microfluidics and industrial metrology. The technique provides non-destructive, three-dimensional insight, combining relatively compact laboratory setups with powerful image contrast.

Limitations include radiation dose concerns for delicate samples, long scan times for high-resolution tomography, large data volumes, and the need for precise alignment and calibration. Access to high-brightness sources can improve performance, but such facilities are not always required for tabletop systems. Ongoing developments aim to improve resolution, speed, and accessibility.