Täpmete

Täpmete are a class of calibration fiducials used in precision metrology and microfabrication to provide fixed reference points during measurement, alignment, and inspection processes. The term is used in industrial and academic contexts to describe tiny markers that are easily detected by optical or scanning instruments.

Common forms include high-contrast marks such as concentric circles, crosshairs, or dots, typically 20 to 500 micrometers in diameter depending on equipment. They may be placed on substrates, tools, or fixtures prior to micromachining or assembly.

These markers serve as coordinate references for tasks like coordinate registration, 3D scanning, and defect localization. In optical systems, images containing täpmete are analyzed to compute the position and orientation of parts with sub-micron accuracy.

Täpmete marks can be fabricated by lithography, laser marking, or deposition. Materials include tungsten carbide, silicon, or reflective metals, chosen for contrast and durability.

There is no universal international standard specifically for täpmete. Practitioners typically define fiducial patterns and tolerances within their organization’s metrology guidelines, emphasizing consistency in mark geometry and spacing to ensure reliable detection across tools.

The concept emerged in the microfabrication community during the late 20th century and has since become routine in semiconductor, MEMS, and precision optics manufacturing. See also fiducial marker, metrology, alignment, coordinate registration, 3D scanning.