SubstratowX

SubstratowX is a substrate material developed for use in microfabrication, biosensing, and microfluidic devices. Described as a versatile, multi-layer platform, SubstratowX combines mechanical rigidity with chemical resilience to permit wafer-scale patterning and functionalization under demanding conditions.

The substrate consists of a ceramic-like inorganic core sandwiched with an organically crosslinked top layer. The stack enables tunable surface chemistries and patterns, with thicknesses from 100 nanometers to a few micrometers. It demonstrates high thermal stability (rated up to about 550°C), low outgassing, and low autofluorescence in the visible range, making it suitable for optical and electrochemical assays. The coefficient of thermal expansion is engineered to closely match silicon wafers, reducing warpage during processing.

The production uses a combination of atomic-layer deposition, chemical vapor deposition, and lamination of pre-patterned films. Surface functionalization is achieved via plasma treatment and silane chemistries, enabling selective binding of biomolecules or inorganic coatings. The process is designed to be scalable for wafer-level manufacturing and allows customization of thickness, roughness, and surface chemistry.

In research settings, SubstratowX has been used for semiconductor prototyping, microfluidic integration, enzyme assays, and flexible electronics demonstrations. It is described as a research-tier material not yet available as a standard commodity for broad markets. Availability remains limited to collaborating labs and pilot production partners.

The SubstratowX concept emerged in 2019 from a collaboration between academic groups and industry partners pursuing robust substrate platforms for hybrid devices. Early prototypes appeared in 2021, with peer-reviewed reports outlining mechanical and chemical performance in 2022–2023.