SiOx
SiOx refers to silicon oxide with a variable oxidation state, expressed as SiO_x, where x is between 1 and 2. The term covers non-stoichiometric silicon oxides that often contain silicon-rich regions or suboxide species embedded in a silicon oxide matrix.
Structure and properties: SiOx materials are typically amorphous and can range from silicon-rich oxide (lower x)
Preparation and characterization: SiOx films and powders are produced by chemical vapor deposition, sputtering, plasma-enhanced methods,
Applications: SiOx serves as a protective coating, interfacial layer, or dielectric in semiconductors, solar cells, and
Notes: The properties of SiOx depend strongly on processing conditions and the exact x value, and the