Mikromechanismen
Mikromechanismen, also known as micromachines or microelectromechanical systems (MEMS), are tiny devices that combine mechanical and electrical components. These devices are typically fabricated using techniques from the semiconductor industry, allowing for the integration of mechanical elements, sensors, actuators, and electronics on a single chip. The size of these components ranges from a few micrometers to millimeters, making them much smaller than conventional mechanical devices.
MEMS technology has found applications in various fields, including consumer electronics, automotive, aerospace, and medical devices.
The fabrication of MEMS devices involves several key processes, including photolithography, etching, and deposition of materials.
However, the development and application of MEMS technology also present challenges. One of the main issues
In summary, Mikromechanismen, or MEMS, are miniature devices that combine mechanical and electrical components, enabling a