Mikrofabrikationslinjer
Mikrofabrikationslinjer, often referred to as microfabrication lines or microfactories, are sophisticated manufacturing facilities designed for the production of micro-scale devices and components. These lines utilize a series of highly precise processes to create structures with dimensions typically in the micrometer range. The core of a mikrofabrikationslinje involves photolithography, where light is used to pattern thin films deposited onto substrates, often silicon wafers. Following the lithography step, etching processes are employed to selectively remove material, thereby defining the desired microstructures. Deposition techniques, such as chemical vapor deposition (CVD) or physical vapor deposition (PVD), are used to add new layers of materials. Other critical processes include wafer bonding for creating multi-layer devices and dicing for separating individual chips. These lines are essential for producing integrated circuits (microchips), microelectromechanical systems (MEMS), microfluidic devices, and other micro-devices used in a vast array of industries, including electronics, telecommunications, automotive, and medical technology. The complexity and cleanliness required for these operations necessitate highly controlled environments, often achieved through cleanrooms.