Microdevices

Microdevices are miniature devices that perform sensing, actuation, computation, or signaling at micrometer to millimeter scales. They encompass MEMS (microelectromechanical systems), microfluidic devices, micro-optical-electro-mechanical systems (MOEMS), and related technologies. They integrate mechanical, electrical, chemical, and optical functions on a compact platform, enabling systems with reduced size, power, and cost.

Most microdevices are fabricated with microfabrication techniques derived from the semiconductor industry, including lithography, etching, deposition, and bonding. These processes allow complex three-dimensional structures in silicon, polymers, glass, and metals. Packaging and interfacing components are critical, as protection must withstand environmental exposure while allowing electrical, fluid, or optical access.

Applications span consumer electronics, automotive sensors, biomedical devices, environmental monitoring, telecommunications, and industrial automation. Examples include accelerometers and gyroscopes in smartphones, microfluidic chips for diagnostic assays, inkjet printheads, and optical MEMS mirrors for projectors or telecommunications.

Design and reliability considerations include mechanical wear, stiction, fatigue, thermal effects, and packaging reliability. Manufacturability, yield, and integration with macroscale systems influence cost and performance. Standards and interoperability efforts facilitate integration across devices and platforms, while intellectual property considerations shape development.

The field emerged from advances in MEMS in the late 20th century, growing alongside microfabrication advancements. Ongoing research explores nano-scale devices, soft materials, biocompatible systems, and integrated sensor networks, expanding the role of microdevices in healthcare, industry, and everyday technology.