MEMSsüsteeme

MEMSsüsteeme, or MEMS systems, refer to integrated micro‑electro‑mechanical systems that combine electrical and mechanical components on a single silicon or other semiconductor substrate at the micrometer scale. These devices typically include microscopic moving parts such as cantilevers, diaphragms, or gears, fabricated using processes derived from the microelectronics industry. MEMS technology originated in the late 1970s with the advent of semiconductor fabrication techniques that allowed mechanical structures to be etched alongside transistors. Since then, MEMS research has grown into a multidisciplinary field encompassing semiconductor physics, materials science, mechanical engineering, and system integration.

Typical MEMS devices include accelerometers, gyroscopes, pressure sensors, micro‑actuators, valves, and optical modulators. Commercial applications range from automotive airbag systems and mobile phone vibration sensors to lab‑on‑a‑chip biomedical diagnostics and optical switching on communication networks. MEMS provide high precision, low power consumption, and the ability to be mass‑produced alongside standard integrated circuits, making them attractive for both consumer and industrial markets.

Designing MEMS systems involves careful consideration of mechanical stress, electrostatic forces, fluid dynamics, and thermal effects. Challenges include maintaining reliability over long operating periods, mitigating issues such as stiction or wear, and integrating sensors with digital control logic. Recent advancements focus on multilayer fabrication, flexible substrates, and hybrid integration with microfluidics and nanoscale sensors, expanding MEMS capabilities into fields such as soft robotics and wearable electronics.