MEMSkomponentidel
MEMSkomponentidel, short for Microelectromechanical Systems, are tiny devices that combine electrical and mechanical components on a microscopic scale. These components are fabricated using techniques from the semiconductor industry, allowing for the integration of mechanical elements, sensors, actuators, and electronics into a single chip. MEMS devices are typically between 1 and 100 micrometers in size, making them ideal for applications where size, weight, and power consumption are critical factors.
MEMS technology has found applications in various fields, including consumer electronics, automotive, aerospace, and healthcare. Some
The fabrication of MEMS components involves several key processes, such as photolithography, etching, and deposition. These
MEMSkomponentidel offer numerous advantages, including miniaturization, integration, and the ability to perform multiple functions on a