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Hafnia

Hafnia is the common name for hafnium oxide, a binary inorganic compound with the formula HfO2. It is a white to off-white solid with a very high melting point of about 2755°C and a density near 9.68 g/cm3. At room temperature hafnia crystallizes in the monoclinic form, with higher-temperature polymorphs (tetragonal and cubic) accessible as it is heated. Hafnia has a wide band gap of about 5.7 eV, and in thin films its dielectric constant can be around 25 depending on processing.

The name hafnia is closely related to hafnium, whose name derives from Hafnia, the Latin name for

Applications of hafnia are predominantly in electronics as a high-k dielectric for semiconductor devices. It is

Safety considerations are generally modest, as hafnia is chemically inert and hafnium oxide has low acute toxicity.

Copenhagen,
where
the
element
was
discovered
in
1923.
Hafnium
oxide
does
not
occur
as
a
pure
natural
mineral;
hafnium
is
typically
obtained
as
a
byproduct
of
zirconium
refining,
and
hafnia
is
usually
produced
synthetically
as
the
oxide.
Industrial
production
methods
include
oxidation
of
hafnium
metal
or
hydrolysis
of
hafnium
halides.
Thin
films
of
HfO2
are
deposited
by
atomic
layer
deposition,
chemical
vapor
deposition,
or
sputtering.
used
as
a
gate
insulator
in
advanced
CMOS
transistors
and
in
other
capacitive
structures,
often
in
combination
with
silicon
to
replace
silicon
dioxide
as
devices
scale
down.
Hafnia
is
also
employed
as
a
ceramic
material
and
in
optical
coatings
and
UV-related
applications.
Doping
with
elements
such
as
silicon,
aluminum,
or
lanthanides
can
modify
its
phase
stability
and
electrical
properties.
Standard
industrial
hygiene
practices
apply
to
dust
formation
and
handling
of
powders.