ionisädeprosesseiden
Ionisädeprosessit, often translated as ion beam processes, encompass a range of techniques that utilize energetic ion beams to modify or analyze materials. These processes are fundamental in various scientific and technological fields, including materials science, semiconductor manufacturing, and fundamental physics research.
At its core, an ion beam process involves accelerating ions to high energies and directing them onto
Ion beam analysis techniques, such as Rutherford backscattering spectrometry (RBS) and particle-induced X-ray emission (PIXE), employ
The energy and type of ions used, as well as the beam current and scan pattern, are