Plasmapuhdistuksen
Plasmapuhdistus, often translated as plasma cleaning, is a surface treatment process that utilizes a low-temperature plasma to modify the surface properties of materials. This technique is employed across various industries to enhance adhesion, remove organic contaminants, and activate surfaces for further processing. The plasma is typically generated in a vacuum chamber or at atmospheric pressure using electrical discharges. Reactive species within the plasma, such as ions, electrons, and neutral radicals, interact with the material surface.
The primary mechanisms involved in plasma cleaning include physical sputtering and chemical etching. Sputtering physically removes
Applications for plasmapuhdistus are diverse. In the electronics industry, it is used to clean semiconductor wafers