Passiveringsfilmer
Passiveringsfilmer, also known as passive films, are a type of film used in the semiconductor industry, particularly in the manufacturing of integrated circuits. These films are applied to the surface of a semiconductor wafer to protect it from contamination and to facilitate the subsequent processing steps. The primary function of a passiveringsfilm is to passivate the surface, meaning it reduces the reactivity of the semiconductor material, thereby preventing the formation of defects and impurities.
Passiveringsfilmer are typically composed of materials such as silicon dioxide (SiO2), silicon nitride (Si3N4), or a
The process of applying a passiveringsfilm involves several steps, including cleaning the wafer surface, depositing the
In addition to their protective role, passiveringsfilmer also play a significant role in the electrical insulation
Overall, passiveringsfilmer are a critical component in the semiconductor manufacturing process, contributing to the reliability, performance,