Microsystemsn
Microsystems, also known as MEMS (Microelectromechanical Systems), are devices that combine electrical and mechanical components on a microscopic scale. They are fabricated using integrated circuit processing techniques and can range in size from a few micrometers to a few millimeters. Microsystems enable miniaturization and integration of sensing, actuating, and control functions into a single chip.
The development of microsystems relies on advancements in microfabrication technologies, including photolithography, etching, and deposition. These
Microsystems have found widespread applications across various industries. In consumer electronics, they are used in accelerometers
The ongoing research and development in microsystems focus on improving performance, reducing cost, and expanding their