MOEMSMikrospiegel
MOEMS Mikrospiegel, or MOEMS micro-mirrors, are micro-electro-mechanical systems that integrate a reflective micromirror with actuators on a single chip to steer or modulate light. The mirrors are typically patterned on silicon substrates and coated with a highly reflective metal such as aluminum or gold. Individual mirrors range from tens to a few hundred micrometers in size and can tilt or rotate about one or two axes to direct light beams.
Actuation is usually electrostatic, realized with comb-drive or parallel-plate configurations, enabling fast, low-power tilting. Other approaches
MOEMS Mikrospiegel are used in a variety of applications, including display projection devices (notably digital micromirror
Manufacturing challenges include achieving precise angular control, preventing stiction, ensuring environmental robustness, and maintaining reliability under