MOEMSMikrospiegel

MOEMS Mikrospiegel, or MOEMS micro-mirrors, are micro-electro-mechanical systems that integrate a reflective micromirror with actuators on a single chip to steer or modulate light. The mirrors are typically patterned on silicon substrates and coated with a highly reflective metal such as aluminum or gold. Individual mirrors range from tens to a few hundred micrometers in size and can tilt or rotate about one or two axes to direct light beams.

Actuation is usually electrostatic, realized with comb-drive or parallel-plate configurations, enabling fast, low-power tilting. Other approaches include electrothermal or piezoelectric actuation. Arrays of mirrors allow parallel control of light across a field, supporting spatial light modulation and rapid beam steering. The optical performance depends on factors such as mirror flatness, tilt angle, response time, and mechanical reliability.

MOEMS Mikrospiegel are used in a variety of applications, including display projection devices (notably digital micromirror device-based projectors), optical switching networks, barcode and colorimetric scanners, spectroscopy instruments, and light-scanning systems for lidar. In display and projection contexts, a two-dimensional array of mirrors reflects light toward or away from a projection path to form images or modulate a light beam.

Manufacturing challenges include achieving precise angular control, preventing stiction, ensuring environmental robustness, and maintaining reliability under cyclic operation. Benefits of MOEMS Mikrospiegel include fast response times, high optical contrast, compact form factors, and low static power consumption when mirrors hold positions. The technology has evolved from MEMS research in the late 20th century and remains active in both commercial and research settings.