MEMStehnoloogiaga
MEMS technology refers to the manufacturing and integration of microelectromechanical systems. It involves the creation of tiny mechanical devices, often comprising semiconductor and microelectronic components, on a single silicon chip. This integration enables the production of miniature devices with precise control over their movements, dimensions, and responses to external stimuli.
Originating in the 1960s, MEMS technology has since evolved into a multidisciplinary field, incorporating expertise from
MEMS devices exhibit a wide range of functionalities, including sensing, actuation, and resonant frequency responses. Applications
* Electronic devices: smart phones, displays, timekeeping, etc.
* Health and biomedicine: biosensors, implantable devices, diagnostic equipment, etc.
* Environmental monitoring: gas sensors, humidity sensors, pressure and flow sensors, etc.
* Consumer goods: inkjet printers, flow control systems, accelerometers, etc.
MEMS technology contributes significantly to miniaturization and customization in various fields, demanding precision engineering, process optimization,