MEMSmicroelektromechanische
MEMS microelectrodes are microfabricated electrode devices that employ microelectromechanical systems (MEMS) processing to interface with biological tissue, primarily for recording neural activity or delivering electrical stimulation. By leveraging batch fabrication, they enable high-density electrode arrays with small footprints suitable for chronic implantation or research probes.
They are typically built on silicon or flexible polymer substrates using MEMS techniques such as photolithography,
Applications include neuroscience research and neural interfaces, brain–machine interfaces, epilepsy monitoring, and neuroprosthetics. Penetrating arrays such
Challenges include the brain’s tissue response (gliosis), micromotion-induced damage, impedance drift, and long-term stability. Mechanical mismatch