GetterPumpen

GetterPumpen, also known as getter pumping, is a technique used in vacuum systems to remove residual gases from the vacuum chamber. This process is crucial for maintaining high vacuum levels, which are essential for various applications such as semiconductor manufacturing, scientific research, and high-precision measurements. The term "Getter" refers to materials that have a high affinity for certain gases, particularly oxygen and nitrogen, which are common contaminants in vacuum systems.

The getter pumping process involves the use of a getter material, typically a reactive metal such as titanium, zirconium, or vanadium, which is placed inside the vacuum chamber. When the chamber is evacuated, the getter material is heated to a high temperature, causing it to release active sites that can chemically bind with the residual gases. This reaction effectively removes the gases from the vacuum chamber, significantly improving the vacuum level.

Getter pumping is particularly effective for removing oxygen and nitrogen, which are difficult to pump out using conventional mechanical pumps. The process is often used in conjunction with other pumping methods, such as turbomolecular pumps or cryopumps, to achieve the desired vacuum level. The getter material can be regenerated by heating it to a high temperature, allowing it to release the bound gases and restore its pumping capacity.

In summary, getter pumping is a valuable technique for achieving high vacuum levels by removing residual gases from vacuum chambers. It is widely used in various industries and research fields where high vacuum conditions are required. The process involves the use of getter materials that chemically bind with residual gases, effectively removing them from the vacuum chamber.