turbomolekyylipumppua

Turbomolekyylipumppu, often referred to as a turbopump, is a type of high vacuum pump that utilizes rotor-stator technology. It operates on the principle of imparting momentum to gas molecules, accelerating them in a specific direction towards the pump's outlet. The pump consists of a high-speed rotor, typically spinning at tens of thousands of revolutions per minute, interspersed with stationary stators. Both the rotor and stator have blades or vanes designed to efficiently transfer momentum to gas molecules.

As gas enters the inlet of the turbomolecular pump, the rapidly rotating rotor blades strike the gas molecules, increasing their kinetic energy and directing them towards the stator. The stator blades then further reduce the velocity of the gas molecules, pushing them towards the next stage of the pump or the exhaust. This process is repeated through multiple stages, progressively lowering the pressure within the vacuum chamber. Turbomolecular pumps are effective in achieving very low pressures, often in the ultra-high vacuum (UHV) range.

Due to their high rotational speeds and the need for precision engineering, turbomolecular pumps require a clean operating environment and often a foreline pump to handle the gas exhausted from the turbopump. They are widely used in scientific research, semiconductor manufacturing, and other applications where clean, high vacuum conditions are essential. The efficiency of a turbomolecular pump depends on factors such as rotor speed, blade geometry, and the molecular weight of the gas being pumped.