mikrofabrikáció
Mikrofabrikáció refers to the process of creating microscopic structures and devices. It is a broad term encompassing various techniques used to fabricate objects with dimensions typically in the micrometer range, though it can also extend to nanometer scales. This field is fundamental to the production of microelectronic components, sensors, micro-mechanical systems (MEMS), and microfluidic devices.
The core principles of mikrofabrikation often involve lithography, a process used to transfer a geometric pattern
Common methods within mikrofabrikation include photolithography, electron-beam lithography, and X-ray lithography for patterning, alongside dry etching